Kufakwe isicelo kwiBhodi yeSekethe eShicileleyo kunye neFlexible Printed Circuit Board, ngenzuzo yokusebenza kakuhle kokuthenda, ukusonjululwa kunye nokubambelela.
Ikhowudi yeMveliso | I-LK-D1238 Ifilimu eyomileyo ye-LDI | LK-G1038 ifilimu eyomileyo |
Ukutyeba (mm) | 38.0±2.0 | |
Ubude (m) | 200m | |
Ububanzi | Ngokutsho abathengi'isicelo |
(1) LK-D1238 LDI ifilimu eyomileyo
I-LK-D1238 LDI Ifilimu eyomileyo ifanelekile kumatshini wokubonisa umfanekiso othe ngqo, kunye ne-wavelength zombini i-355nm kunye ne-405nm.
Into kunye nendlela yoVavanyo | Idatha yoVavanyo | |||
Elona xesha lifutshane lomfanekiso (1.0wt.% Na2CO3 isisombululo samanzi, 30℃) *2 | 25s | |||
Ubude bamaza (nm) | 355 | 405 | ||
Ukusebenza emva koMfanekiso | Ukubonakala kwefoto (*2×2.0) | ST=7/21 Amandla esisityhilelo*3 | 20mJ/cm2 | 15mJ/cm2 |
Isigqibo(*2×2.0) | ST=6/21 | 40mm | 40mm | |
ST=7/21 | 40mm | 40mm | ||
ST=8/21 | 50mm | 50mm | ||
Ukuncamathela (*2×2.0) | ST=6/21 | 50mm | 50mm | |
ST=7/21 | 40mm | 40mm | ||
ST=8/21 | 35mm | 35mm | ||
【UThengisa uRukufaneleka】*3 Imingxuma eyi-10 (6mmf) Ireyithi yokuqhawuka komngxuma (*2×2.0×Amaxesha ama-3) | ST=6/21 | 0% | 0% | |
ST=7/21 | 0% | 0% | ||
ST=8/21 | 0% | 0% | ||
Ixesha lokuphela kwexesha (3.0wt.%NaOH isisombululo samanzi, 50℃) | ST=7/21* 1 Amandla okuvezwa | 50s | 50s |
(2) LK-G1038 ifilimu eyomileyo
I-LK-G1038 Ifilimu eyomileyo ifanelekile ukuqhagamshelana nomatshini wokuvezwa, kunye ne-wave mainubude 365nm.
Into kunye nendlela yoVavanyo | Idatha yoVavanyo | ||
Elona xesha lifutshane lomfanekiso (1.0wt.% Na2CO3 isisombululo samanzi, 30℃) *2 | 22s | ||
Ukusebenza emva koMfanekiso | Ukubonakala kwefoto (*2×2.0) | ST=8/21 Amandla esisityhilelo*3 | 90mJ/cm2 |
Isigqibo (*2×2.0) | ST=6/21 | 32.5mm | |
ST=7/21*1 | 32.5mm | ||
ST=8/21 | 35mm | ||
Ukuncamathela (*2×2.0) | ST=6/21 | 45mm | |
ST=7/21 | 40mm | ||
ST=8/21 | 35mm | ||
(Ukunyamekela ukuthembeka)*3 Imingxuma eyi-10 (6mmf) Ireyithi yokuqhawuka komngxuma (*2×2.0×Amaxesha ama-3) | ST=6/21 | 0% | |
ST=7/21 | 0% | ||
ST=8/21 | 0% | ||
Ixesha lokuphela kwexesha (3.0wt.%NaOHwater isisombululo, 50℃) | ST=7/21*1 Amandla okuvezwa | 50s |
(Le datha ingentla yeyoreferensi kuphela)
Phawula:
*1: Stouffer 21 Stage Exposure Energy Scale.
*2×2.0: Umfanekiso onexesha eliphindwe kabini lelona xesha lifutshane lomfanekiso.
*3: Ukuba kugxilwe kwiTending Reliability, kuyacetyiswa ukuba usebenzise ixabiso le-exposure energy ye-7~Inqanaba lesi-8.
*4: Le datha ingentla ivavanywa zizixhobo zethu kunye nezixhobo.
(1) Isicelo : Sebenzisa le filimu kuphela njengokumelana nezinto ezinxulumene nebhodi yesekethe eprintiweyo kunye nolunye uhlobo lwepateni.
(2) Unyango lwangaphambili : Iintsalela ze-Organic, amabala ngenxa yokungonelanga kwamanzi kunye nokomisa kwindawo yobhedu, kunokubangela i-polymerization yokumelana kunye nokungena kwe-plating okanye isisombululo se-etching.Nceda usule ngokupheleleyo emva kokuhlanjululwa kwamanzi. Ngokukodwa, xa ukufuma kuhlala ngaphakathi kumngxuma odlulayo, kubangela ukuba intente iqhekezwe.
(3) I-substrate preheating : Ukufudumala kwiqondo lokushisa eliphezulu kakhulu ixesha elide kunokubangela umhlwa. Kufuneka kwenziwe ngaphantsi kwe-10 min kwi-80 ℃ kwaye ngaphantsi kwe-3 min kwi-150 ℃. Kwaye xa iqondo lobushushu bomphezulu wesubstrate phambi kokuba i-lamination ingaphezulu kwe-70℃, ubukhulu befilimu kumphetho womngxuma bungabhitya kakhulu kwaye kunokubangela ukwaphuka kwentente.
(4) Ukubamba emva kwe-lamination kunye nokuvezwa : Bamba ngekhaka lokukhanya okanye phantsi kwesibane esityheli (iimitha ezi-2 okanye umgama ongaphezulu ofunekayo). Ixesha elide lokubamba kwimeko yokugqibela (phantsi kwesibane esiphuzi) ziintsuku ezi-4. Ukuvezwa kufuneka kwenziwe kwiintsuku ezi-4 emva kokulahlwa.Uphuhliso kufuneka lwenziwe phakathi kweentsuku ezi-3 emva kokuvezwa. Imitha yesibane esimhlophe esingeso-ultraviolet inemitha ye-ultraviolet, ngoko bamba ngesibane esikhanyayo ngeshiti elimnyama phantsi kwayo.Gcina ubushushu obungama-23±2℃ kunye nokufuma okunxulumene ne-60±10%RH. I-substrates ene-laminated kufuneka ifakwe kwi-rack nganye nganye.
(5) Uphuhliso: Xa ubushushu bomphuhlisi bungaphezulu kwe-35 ℃, inokwenza ukumelana neprofayili ibe mandundu.
(6) Ukuhluba : Ukuhluba kwisithuba seveki enye emva kokulanyiswa.
(7) Ukuphathwa kwenkunkuma : Amacandelo efilimu eyomileyo kumphuhlisi kunye ne-stripper inokudityaniswa ngokungathathi hlangothi. Amacandelo adibeneyo anokwahlulwa kwisisombululo samanzi ngokucofa indlela yokucoca kunye nendlela ye-centrifugal. Isisombululo samanzi esahlukileyo sinexabiso elithile le-COD kunye ne-BOD, ngoko ke kufuneka ukuba inkunkuma-inkunkuma iphathwe ngendlela efanelekileyo.
(8) Umbala wefilimu : Umbala uluhlaza/bhlowu. Nangona umbala unokujika ngokuthe ngcembe ngokuhamba kwexesha, akufuneki ukuba uphembelele uphawu.
(1) Xa ugcino lusenziwa kwindawo emnyama, epholileyo, neyomileyo kumaqondo obushushu obuyi-5℃20℃ kunye nokufuma okungama-60% RH okanye ngaphantsi, ifilimu eyomileyo kufuneka isetyenziswe kwiintsuku ezingama-50 emva kokwenziwa.
(2) Gcina imiqulu yefilimu ngokuthe tye ngokusebenzisa iiracks okanye iibhodi zokuxhasa ukugcinwa. Xa zibekwe ngokuthe nkqo, amashiti efilimu eyomileyo asenokutyibilika nganye nganye kwaye ukumila kwawo kusenokufana nehlumelo loqalo (imiqulu ibekwe phantsi ngokuthe tye kwiphakheji).
(3) Khupha imiqulu yefilimu kwiphepha elimnyama phantsi kwesibane esityheli okanye uhlobo olufanayo lwesibane sokhuseleko. Ungazishiyi phantsi kwesibane esityheli ixesha elide. Gubungela imiqulu yefilimu ngephepha elimnyama xa uzigcina ixesha elide.